Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter
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[1] S. H. Kim,et al. Fabrication of a 50 nm half-pitch wire grid polarizer using nanoimprint lithography , 2005 .
[2] Antonello De Martino,et al. Mueller polarimetric imaging system with liquid crystals. , 2004, Applied optics.
[3] S. Krishnan,et al. Mueller-matrix ellipsometry using the division-of-amplitude photopolarimeter: a study of depolarization effects. , 1994, Applied optics.
[4] Alain C. Diebold,et al. Investigation of E-beam patterned nanostructures using Mueller Matrix based Scatterometry , 2012, Advanced Lithography.
[5] F. Delplancke,et al. Automated high-speed Mueller matrix scatterometer. , 1997, Applied optics.
[6] Yukitoshi Otani,et al. Surface profile detection with nanostructures using a Mueller matrix polarimeter , 2008, Optical Engineering + Applications.
[7] J M Saiz,et al. Polar decomposition of the Mueller matrix: a polarimetric rule of thumb for square-profile surface structure recognition. , 2011, Applied optics.
[8] K. Yee. Numerical solution of initial boundary value problems involving maxwell's equations in isotropic media , 1966 .
[9] J. L. Pezzaniti,et al. Depolarization in liquid-crystal televisions. , 1993, Optics letters.
[10] J. McNeil,et al. Ellipsometric Scatterometry for the Metrology of Sub-0.1- num-Linewidth Structures. , 1998, Applied optics.
[11] J. McNeil,et al. Multiparameter grating metrology using optical scatterometry , 1997 .
[12] J. L. Pezzaniti,et al. Phase-only modulation of a twisted nematic liquid-crystal TV by use of the eigenpolarization states. , 1993, Optics letters.
[13] Enric Garcia-Caurel,et al. Spectroscopic Mueller polarimeter based on liquid crystal devices , 2004 .
[14] T. Gaylord,et al. Rigorous coupled-wave analysis of planar-grating diffraction , 1981 .
[15] John R. McNeil,et al. Metrology of subwavelength photoresist gratings using optical scatterometry , 1995 .
[16] Jr. G.E. Jellison,et al. Spectroscopic ellipsometry data analysis : measured versus calculated quantities , 1997 .