웨이퍼 단면 연삭기 구조물의 최적설계 및 강성평가

In this paper, an optimum design method based on G.A. with variable penalty was applied to the structural design optimization of a wafer grinding machine for minimum weight and maximum stiffness. The contradictive objectives were converted into a single objective function by using weighting method and introducing compliance instead of stiffness. The design optimization conducts static- and dynamic-optimizations successively. In the dynamic optimization, the solution having best fitness is selected among GDS(Good Design Solution set), which is the set of solutions having relatively higher fitness. GDS is obtained from static design optimization process. after design optimization, the dynamic compliance of the machine structure was reduced by 14.6% with a little increase of weight by 2.3% than before. The measured compliance of the optimum designed wafer grinding machine showed good agreement with the theoretical optimization result.