Fabrication of low frequency AC-DC thermal converter with a thermal mass

The use of a thin film or a planar multijunction thermal converter (PMJTC) for the ac-dc transfer of voltage and current is well established. In general, a three dimensional multijunction thermal converter (MJTC) has the advantage of accuracy and a single junction thermal converter (SJTC) has that of low cost. PMJTCs provide a long-term stability, a high sensitivity and a high-dynamic-frequency range. It is well known that PMJTCs show small ac-dc voltage transfer differences in the audiofrequency range. However, it is difficult to obtain a small ac-dc transfer difference at low frequencies, particularly with thin-film-based thermal converters. The small ac-dc transfer difference at low frequencies is caused by nonlinearities in the heat transport mechanism (in thin films) and in the thermal-to-electric conversion process (in the thermocouples of thin films). This study has been conducteded to achieve a smaller ac-dc transfer difference on thin-film chromel-alumel thermal converters operating at low frequencies. An optional silicon obelisk is formed underneath the thin membrane to minimize ac-dc transfer differences at lower frequencies. The floating obelisk structure enhances the isothermal operation and slows thermal transfer compared with the standard configuration without the obelisk, resulting in a smaller ac-dc transfer difference at low frequencies. Also, it is possible that thin-film thermal converters can be used as the flow sensor and infrared sensor.