An integrated optical waveguide and charge-coupled-device image array

The device structure and experimental operation of an integrated optical waveguide and charge-coupled device (CCD) detector array are considered. The use of silicon as a substrate allows direct fabrication of the CCD detector array and a thermally oxidized layer of SiO2forms an effective substrate for waveguide deposition. The detector array is composed of a two-phase overlapping-gate CCD with first-level polycrystalline silicon electrodes and second-level aluminum electrodes connected in parallel by means of a series of gates to an array of pbotodiodes. In the photodiode region the SiO2layer is tapered to a termination so that with minimal scatter, light is multiply refracted into the detector region. The center-to-center detector element spacing of the device fabricated and successfully operated is 32 μm. Optimum detector length is considered as a function of waveguide thickness. The integrated waveguide-CCD array is expected to become an integral part of various signal-processing devices.

[1]  J. H. Harris,et al.  Optical Guided-Wave Focusing and Diffraction* , 1971 .

[2]  R. Mehta,et al.  Application of bimagnetic rotation. , 1971, Applied optics.

[3]  C. Tseng,et al.  Optical waveguides fabricated by preferential etching. , 1975, Applied optics.

[4]  Chen S. Tsai,et al.  Ultrafast guided‐light beam deflection/switching and modulation using simulated electro‐optic prism structures in LiNbO3 waveguides , 1975 .

[5]  Electrooptic modulation in a thin film waveguide. , 1971, Applied optics.

[6]  T. Duzer.  Lenses and graded films for focusing and guiding acoustic surface waves , 1970 .

[7]  F.Y.K. Dea,et al.  An optical CCD convolver , 1976, IEEE Transactions on Electron Devices.

[8]  C. Wilkinson,et al.  Thin-film acoustooptic devices , 1976, Proceedings of the IEEE.

[9]  M. White,et al.  An analog CCD transversal fileter with floating clock electrode sensor and variable tap gains , 1976, 1976 IEEE International Solid-State Circuits Conference. Digest of Technical Papers.

[10]  R. D. Nelson,et al.  Application of charge-coupled devices to infrared detection and imaging , 1975, Proceedings of the IEEE.

[11]  F. Hickernell,et al.  Zinc-oxide thin-film surface-wave transducers , 1976, Proceedings of the IEEE.

[12]  P. K. Tien,et al.  Theory of Prism–Film Coupler and Thin-Film Light Guides , 1970 .

[13]  C.S. Tsai,et al.  High-performance guided-wave acoustooptic scanning devices using multiple surface acoustic waves , 1976, Proceedings of the IEEE.

[14]  M. F. Tompsett,et al.  Charge-coupled imaging devices: Experimental results , 1971 .

[15]  A. Tasch,et al.  Experimental characterization of transfer Efficiency in charge-coupled devices , 1975, IEEE Transactions on Electron Devices.

[16]  D.F. Barbe,et al.  Imaging devices using the charge-coupled concept , 1975, Proceedings of the IEEE.

[17]  W. F. Kosonocky,et al.  Two-phase charge-coupled devices with overlapping polysilicon and aluminum gates. , 1973 .

[18]  M. Alhaider,et al.  Wide-band guided-wave acoustooptic Bragg diffraction and devices using multiple tilted surface acoustic waves , 1976, Proceedings of the IEEE.

[19]  Lawrence Kuhn,et al.  DEFLECTION OF AN OPTICAL GUIDED WAVE BY A SURFACE ACOUSTIC WAVE , 1970 .

[20]  Joseph T. Boyd,et al.  Integrated optical silicon photodiode array , 1975 .