Flexibility measures for qualification management in wafer fabs
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Stéphane Dauzère-Pérès | Philippe Vialletelle | Carl Johnzén | P. Vialletelle | C. Johnzen | S. Dauzére-Pérés
[1] Eugene L. Lawler,et al. On Preemptive Scheduling of Unrelated Parallel Processors by Linear Programming , 1978, JACM.
[2] Kathryn E. Stecke,et al. Classification of flexible manufacturing systems , 2011 .
[3] Stéphane Dauzère-Pérès,et al. Impact of qualification management on scheduling in semiconductor manufacturing , 2008, 2008 Winter Simulation Conference.
[4] Stephen C. Graves,et al. Process Flexibility in Supply Chains , 2003, Manag. Sci..
[5] Huixing Zhou,et al. Analysis of a diamond-shaped mechanical amplifier for a piezo actuator , 2007 .
[6] J. Achacoso,et al. Partnering for the integration of equipment recipe services into an automated factory , 1995, Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop.
[7] Oscar A. Saenz,et al. Analysis of the structural measures of flexibility and agility using a measurement theoretical framework , 2003 .
[8] N. G. Pierce,et al. Dynamic dispatch and graphical monitoring system , 1998, IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168).
[9] Recipe Management: A Matter of Efficiency , 1999 .
[10] Suresh P. Sethi,et al. Flexibility in manufacturing: A survey , 1990 .
[11] Sau Man Lai,et al. Measurement of Plant Flexibility , 2007 .
[12] M. Ono,et al. Inspection recipe management based on captured defect distribution , 2003 .
[13] Desheng Dash Wu,et al. A generic approach to measuring the machine flexibility of manufacturing systems , 2008, Eur. J. Oper. Res..
[14] Marie-Laure Espinouse,et al. Robustesse de la configuration d'un parc de machines partiellement multifonctions , 2005 .
[15] Sanchoy K. Das,et al. The measurement of flexibility in manufacturing systems , 1996 .
[16] Marie-Laure Espinouse,et al. ABOUT CONFIGURATION UNDER UNCERTAINTY OF A POWER DISTRIBUTION NETWORK , 2006 .
[17] Michael Fuchs,et al. An open framework for integrated qualification management portals , 2002, Proceedings. 13th International Workshop on Database and Expert Systems Applications.
[18] K. Potti,et al. Cycle time reduction at a major Texas Instruments wafer fab , 2003, Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI.
[19] Stefano Tonchia,et al. Performance measurement systems - Models, characteristics and measures , 2001 .
[20] E. Zahara,et al. Real-coded genetic algorithm for stochastic optimization: A tool for recipe qualification of semiconductor manufacturing under noisy environments , 2005 .
[21] Stefano Tonchia,et al. Manufacturing flexibility: A literature review , 1998 .
[22] N. G. Pierce,et al. Dynamic dispatch and graphical monitoring system , 1999, 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314).
[23] M. Comerford,et al. Equipment management system (EMS) , 1995, Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop.