Dielectric Breakdown in 2D Layered Hexagonal Boron Nitride — The Knowns and the Unknowns

Dielectric breakdown is one of the critical failure mechanisms at the front-end that has attracted academics and industrial scientists alike, for several decades now, with the aim of understanding its physical origin, statistical nature and electrical impact on the device and circuit performance, reliability and variability. A major portion of the effort has dealt with studying breakdown in SiO2 and HfO2, which are the two most common bulk dielectric materials used in silicon CMOS technology. While there are several new high-κ materials that are being used for logic and memory technology, the advent of graphene based nanoelectronics for energy efficient flexible / wearable applications has intensified the interest to explore suitable 2D materials that could serve as a good insulator on a graphene platform. While fluorographene was one of the plausible candidates, it turns out that hexagonal boron nitride (h-BN) appears to be a potential candidate for flexible electronics. The current state of understanding on the breakdown kinetics in h-BN has been very myopic and superficial. As such, it is timely to review the current state of understanding of breakdown in h-BN and discuss the knowns and the unknowns in this field, which could further motivate research groups to create deeper understanding of this important topic. This study documents the recent findings from various research groups pertaining to breakdown in h-BN in a systematic manner from multiple perspectives - growth, electrical characterization, physical analysis and statistical modeling.

[1]  H. Neddermeyer,et al.  Scanning tunnelling microscopy of semiconductor surfaces , 1996 .

[2]  K. Loh,et al.  Graphene photonics, plasmonics, and broadband optoelectronic devices. , 2012, ACS nano.

[3]  Andre K. Geim,et al.  The rise of graphene. , 2007, Nature materials.

[4]  C. Gerber,et al.  Surface Studies by Scanning Tunneling Microscopy , 1982 .

[5]  L. Dissado,et al.  Weibull Statistics in Dielectric Breakdown; Theoretical Basis, Applications and Implications , 1984, IEEE Transactions on Electrical Insulation.

[6]  Feng Wang,et al.  Characterization and manipulation of individual defects in insulating hexagonal boron nitride using scanning tunnelling microscopy. , 2015, Nature nanotechnology.

[7]  C. Eddy,et al.  Electron backscatter diffraction study of hexagonal boron nitride growth on Cu single-crystal substrates. , 2015, ACS applied materials & interfaces.

[8]  Takashi Taniguchi,et al.  Epitaxial growth of single-domain graphene on hexagonal boron nitride. , 2013, Nature materials.

[9]  Xu Jing,et al.  Dielectric Breakdown in Chemical Vapor Deposited Hexagonal Boron Nitride. , 2017, ACS applied materials & interfaces.

[10]  L. Larcher,et al.  Single vacancy defect spectroscopy on HfO2 using random telegraph noise signals from scanning tunneling microscopy , 2016 .

[11]  K. Pey,et al.  CAFM based spectroscopy of stress-induced defects in HfO2 with experimental evidence of the clustering model and metastable vacancy defect state , 2016, 2016 IEEE International Reliability Physics Symposium (IRPS).

[12]  Jing Kong,et al.  Synthesis of few-layer hexagonal boron nitride thin film by chemical vapor deposition. , 2010, Nano letters.

[13]  A. Reina,et al.  Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. , 2009, Nano letters.

[14]  Yimin A. Wu,et al.  Spatial control of defect creation in graphene at the nanoscale , 2012, Nature Communications.

[15]  K. Pey,et al.  Localized Random Telegraphic Noise Study in HfO2 dielectric stacks using Scanning Tunneling Microscopy — Analysis of process and stress-induced traps , 2015, 2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits.

[16]  Ertl,et al.  Scanning tunneling microscopy observations on the reconstructed Au(111) surface: Atomic structure, long-range superstructure, rotational domains, and surface defects. , 1990, Physical review. B, Condensed matter.

[17]  Amina Taleb-Ibrahimi,et al.  Exceptional ballistic transport in epitaxial graphene nanoribbons , 2013, Nature.

[18]  Soo Min Kim Wafer-scale single-crystal hexagonal boron nitride film via self-collimated grain formation , 2019, 2019 Compound Semiconductor Week (CSW).

[19]  Bjarke S. Jessen,et al.  The hot pick-up technique for batch assembly of van der Waals heterostructures , 2016, Nature communications.

[20]  N. Peres,et al.  Electron tunneling through ultrathin boron nitride crystalline barriers. , 2012, Nano letters.

[21]  T. Nigam,et al.  Accurate model for time-dependent dielectric breakdown of high-k metal gate stacks , 2009, 2009 IEEE International Reliability Physics Symposium.

[22]  Hiroshi Iwai,et al.  Bilayer gate dielectric study by scanning tunneling microscopy , 2007 .

[23]  Kenji Watanabe,et al.  Anisotropic Dielectric Breakdown Strength of Single Crystal Hexagonal Boron Nitride. , 2016, ACS applied materials & interfaces.

[24]  Kenneth L. Shepard,et al.  Electron tunneling through atomically flat and ultrathin hexagonal boron nitride , 2011 .

[25]  A. Ranjan,et al.  Conductive Atomic Force Microscope Study of Bipolar and Threshold Resistive Switching in 2D Hexagonal Boron Nitride Films , 2018, Scientific Reports.

[26]  Mario Lanza,et al.  Bimodal Dielectric Breakdown in Electronic Devices Using Chemical Vapor Deposited Hexagonal Boron Nitride as Dielectric , 2018 .

[27]  H. Jeong,et al.  Growth of high-crystalline, single-layer hexagonal boron nitride on recyclable platinum foil. , 2013, Nano letters.

[28]  S. Iijima,et al.  Direct evidence for atomic defects in graphene layers , 2004, Nature.

[29]  A Gholinia,et al.  Electronic properties of graphene encapsulated with different two-dimensional atomic crystals. , 2014, Nano letters.

[30]  Kenji Watanabe,et al.  Minimizing residues and strain in 2D materials transferred from PDMS , 2018, Nanotechnology.

[31]  Jannik C. Meyer,et al.  Atomic Structure of Intrinsic and Electron-Irradiation-Induced Defects in MoTe2 , 2018, Chemistry of materials : a publication of the American Chemical Society.

[32]  G. Groeseneken,et al.  A comprehensive model for breakdown mechanism in HfO/sub 2/ high-k gate stacks , 2004, IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004..

[33]  Takashi Taniguchi,et al.  Synthesis of high-purity boron nitride single crystals under high pressure by using Ba-BN solvent , 2007 .

[34]  Michael J. Ford,et al.  Defect states in hexagonal boron nitride: Assignments of observed properties and prediction of properties relevant to quantum computation , 2018, 1802.03130.

[35]  Satoru Suzuki,et al.  Growth and low-energy electron microscopy characterization of monolayer hexagonal boron nitride on epitaxial cobalt , 2013, Nano Research.

[36]  Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials. , 2017, Chemical Society reviews.

[37]  J. Rodriguez,et al.  Proposed universal relationship between dielectric breakdown and dielectric constant , 2002, Digest. International Electron Devices Meeting,.

[38]  A. Krasheninnikov,et al.  Electron knock-on damage in hexagonal boron nitride monolayers , 2010 .

[39]  M. Dresselhaus,et al.  Synthesis of large-area multilayer hexagonal boron nitride for high material performance , 2015, Nature Communications.

[40]  Guido Groeseneken,et al.  A new analytic model for the description of the intrinsic oxide breakdown statistics of ultra-thin oxides , 1996 .

[41]  Jack C. Lee,et al.  Thinnest Nonvolatile Memory Based on Monolayer h‐BN , 2019, Advanced materials.

[42]  Impact ionization and transport properties of hexagonal boron nitride in a constant-voltage measurement , 2018, 1801.08727.

[43]  J. Stathis Percolation models for gate oxide breakdown , 1999 .

[44]  Takashi Taniguchi,et al.  Direct-bandgap properties and evidence for ultraviolet lasing of hexagonal boron nitride single crystal , 2004, Nature materials.

[45]  J. Warner,et al.  Structural transformations in graphene studied with high spatial and temporal resolution. , 2009, Nature nanotechnology.

[46]  Gotthard Seifert,et al.  Vacancy migration in hexagonal boron nitride , 2007 .

[47]  Takashi Taniguchi,et al.  Layer-by-layer dielectric breakdown of hexagonal boron nitride. , 2015, ACS nano.

[48]  F. Schwierz Graphene transistors. , 2010, Nature nanotechnology.

[49]  Guofa Cai,et al.  Hexagonal Boron Nitride Thin Film for Flexible Resistive Memory Applications , 2016 .

[50]  Jing Kong,et al.  Electrical Homogeneity of Large-Area Chemical Vapor Deposited Multilayer Hexagonal Boron Nitride Sheets. , 2017, ACS applied materials & interfaces.

[51]  Nagarajan Raghavan,et al.  Mechanism of soft and hard breakdown in hexagonal boron nitride 2D dielectrics , 2018, 2018 IEEE International Reliability Physics Symposium (IRPS).

[52]  C. Jin,et al.  Fabrication of a freestanding boron nitride single layer and its defect assignments. , 2009, Physical review letters.

[53]  D. Xue,et al.  Magnetic properties of vacancies in a graphitic boron nitride sheet by first-principles pseudopotential calculations , 2007 .

[54]  James H. Stathis,et al.  Modeling of time-dependent non-uniform dielectric breakdown using a clustering statistical approach , 2013 .

[55]  Christian Kisielowski,et al.  Atomically thin hexagonal boron nitride probed by ultrahigh-resolution transmission electron microscopy , 2009 .

[56]  Eric Pop,et al.  Electronic synapses made of layered two-dimensional materials , 2018, Nature Electronics.

[57]  Meiyun Zhang,et al.  Boron nitride as two dimensional dielectric: Reliability and dielectric breakdown , 2016 .

[58]  W. Orellana,et al.  Stability of native defects in hexagonal and cubic boron nitride , 2001 .

[59]  Boris I. Yakobson,et al.  Grain Boundary Structures and Electronic Properties of Hexagonal Boron Nitride on Cu(111). , 2015, Nano letters.

[60]  Jingxiang Zhao,et al.  Theoretical study of oxidation of monovacancies in hexagonal boron nitride (h-BN) sheet by oxygen molecules , 2014, Journal of Molecular Modeling.

[61]  H. Wong,et al.  Coexistence of volatile and non-volatile resistive switching in 2D h-BN based electronic synapses , 2017, 2017 IEEE International Electron Devices Meeting (IEDM).

[62]  J. Yeo,et al.  Synthesis of wafer-scale hexagonal boron nitride monolayers free of aminoborane nanoparticles by chemical vapor deposition , 2014, Nanotechnology.

[63]  Jae Hwan Jeong,et al.  Mechanical properties of two-dimensional materials and their applications , 2018, Journal of Physics D: Applied Physics.

[64]  G. Seifert,et al.  Defective structure of BN nanotubes: from single vacancies to dislocation lines. , 2006, Nano letters.

[65]  L. Larcher,et al.  Random telegraph noise in 2D hexagonal boron nitride dielectric films , 2018 .

[66]  L. Larcher,et al.  Localized characterization of charge transport and random telegraph noise at the nanoscale in HfO2 films combining scanning tunneling microscopy and multi-scale simulations , 2017 .

[67]  A.T. Krishnan,et al.  Analytic Extension of the Cell-Based Oxide Breakdown Model to Full Percolation and its Implications , 2007, 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual.

[68]  R. Waser,et al.  Coexistence of Grain‐Boundaries‐Assisted Bipolar and Threshold Resistive Switching in Multilayer Hexagonal Boron Nitride , 2017 .

[69]  Alexander L. Shluger,et al.  The interaction of oxygen vacancies with grain boundaries in monoclinic HfO2 , 2009 .

[70]  B. V. van Wees,et al.  Fast pick up technique for high quality heterostructures of bilayer graphene and hexagonal boron nitride , 2014, 1403.0399.

[71]  Andre K. Geim,et al.  Two-dimensional atomic crystals. , 2005, Proceedings of the National Academy of Sciences of the United States of America.

[72]  Nagarajan Raghavan,et al.  Study of preferential localized degradation and breakdown of HfO2/SiOx dielectric stacks at grain boundary sites of polycrystalline HfO2 dielectrics , 2013 .

[73]  Alexander L. Shluger,et al.  A microscopic mechanism of dielectric breakdown in SiO2 films: An insight from multi-scale modeling , 2017 .

[74]  Jun Lou,et al.  Large scale growth and characterization of atomic hexagonal boron nitride layers. , 2010, Nano letters.

[75]  Zhongfan Liu,et al.  Controllable Co‐segregation Synthesis of Wafer‐Scale Hexagonal Boron Nitride Thin Films , 2014, Advanced materials.