Optimal control of convection–diffusion process with time-varying spatial domain: Czochralski crystal growth

Abstract This paper considers the optimal control of convection–diffusion systems modeled by parabolic partial differential equations (PDEs) with time-dependent spatial domains for application to the crystal temperature regulation problem in the Czochralski (CZ) crystal growth process. The parabolic PDE model describing the temperature dynamics in the crystal region arising from the first principles continuum mechanics is defined on the time-varying spatial domain. The dynamics of the domain boundary evolution, which is determined by the mechanical subsystem pulling the crystal from the melt, are described by an ordinary differential equation for rigid body mechanics and unidirectionally coupled to the convection–diffusion process described by the PDE system. The representation of the PDE as an evolution system on an appropriate infinite-dimensional space is developed and the analytic expression and properties of the associated two-parameter semigroup generated by the nonautonomous operator are provided. The LQR control synthesis in terms of the two-parameter semigroup is considered. The optimal control problem setup for the PDE coupled with the finite-dimensional subsystem is presented and numerical results demonstrate the regulation of the two-dimensional crystal temperature distribution in the time-varying spatial domain.

[1]  P. K. C. Wang,et al.  Stabilization and control of distributed systems with time-dependent spatial domains , 1990 .

[2]  György Szabó,et al.  Thermal strain during Czochralski growth , 1985 .

[3]  Michael Hinze,et al.  Optimal control of the free boundary in a two-phase Stefan problem , 2007, J. Comput. Phys..

[4]  Jeffrey J. Derby,et al.  Finite-element methods for analysis of the dynamics and control of Czochralski crystal growth , 1987 .

[5]  Costas J. Spanos,et al.  Advanced process control , 1989 .

[6]  J. Derby,et al.  On the dynamics of Czochralski crystal growth , 1987 .

[7]  Kazumfumi Lto,et al.  Finite-dimensional compensators for infinite-dimensional systems via Galerkin-type approximation , 1990 .

[8]  Jeffrey J. Derby,et al.  Thermal-capillary analysis of Czochralski and liquid encapsulated Czochralski crystal growth: I. Simulation , 1986 .

[9]  P. Kokotovic,et al.  The peaking phenomenon and the global stabilization of nonlinear systems , 1991 .

[10]  R. Abraham,et al.  Manifolds, Tensor Analysis, and Applications , 1983 .

[11]  Philippe Martin,et al.  Boundary control of a nonlinear Stefan problem , 2003, 42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475).

[12]  J. Z. Zhu,et al.  The finite element method , 1977 .

[13]  Talid Sinno,et al.  Modeling Microdefect Formation in Czochralski Silicon , 1999 .

[14]  Robert A. Brown,et al.  Theory of transport processes in single crystal growth from the melt , 1988 .

[15]  W. D. Evans,et al.  PARTIAL DIFFERENTIAL EQUATIONS , 1941 .

[16]  Amnon Pazy,et al.  Semigroups of Linear Operators and Applications to Partial Differential Equations , 1992, Applied Mathematical Sciences.

[17]  Meir Shillor,et al.  Dynamic Contact with Normal Compliance Wear and Discontinuous Friction Coefficient , 2002, SIAM J. Math. Anal..

[18]  P. K. C. Wang FEEDBACK CONTROL OF A HEAT DIFFUSION SYSTEM WITH TIME‐DEPENDENT SPATIAL DOMAIN , 1995 .

[19]  J. Derby,et al.  Thermal-capillary analysis of Czochralski and liquid encapsulated Czochralski crystal growth. II - Processing strategies , 1986 .

[20]  Chung-Wen Lan,et al.  Recent progress of crystal growth modeling and growth control , 2004 .

[21]  Paolo Acquistapace,et al.  Infinite-horizon linear-quadratic regulator problems for nonautonomous parabolic systems with boundary control , 1996 .

[22]  Robert McOwen,et al.  Partial differential equations : methods and applications , 1996 .

[23]  Mark J. Balas,et al.  Exponentially stabilizing finite-dimensional controllers for linear distributed parameter systems: Galerkin approximation of infinite dimensional controllers , 1986 .

[24]  T. R. Hughes,et al.  Mathematical foundations of elasticity , 1982 .

[25]  F. Flandoli,et al.  Initial boundary value problems and optimal control for nonautonomous parabolic systems , 1991 .

[26]  S. Mitter,et al.  Representation and Control of Infinite Dimensional Systems , 1992 .

[27]  Antonios Armaou,et al.  Robust control of parabolic PDE systems with time-dependent spatial domains , 2001, Autom..