Integrated micro focusing and tracking sensor

We have developed an integrated optical tracking and focusing sensor, which is a chip 1 mm by 0.5 mm. It can travel along guide patterns keeping a certain gap between itself and the guide pattern. It consists of a laser diode, monolithically fabricated photodiodes and microlenses having a graded refractive index distribution in the thickness direction. Experimental results showed that this integrated sensor can be used as a focusing and tracking sensor with sub-micron accuracy.

[1]  Renshi Sawada,et al.  Integrated coupling device between a laser diode and an optical fiber using a microlens , 1994 .

[2]  R. Sawada,et al.  Gradient-index microlens formed by ion-beam sputtering. , 1992, Applied optics.

[3]  T. Suhara,et al.  An integrated-optic disk pickup device , 1986 .

[4]  Renshi Sawada,et al.  Reactive–fast‐atom beam etching of GaAs using Cl2 gas , 1989 .

[5]  R. Sawada.  Integrated Optical Encoder , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.