Whole Subscale Ion Optics Simulation: Direct Ion Impingement and Electron Backstreaming

A fully three-dimensional Hybrid-Grid Immersed-Finite-Element Particle-In-Cell (HGIFE-PIC) code has been developed for modelling of an entire subscale ion optics. The code applies a new meshing technique in which the particles are sampled on a uniform Cartesian mesh whereas the electrostatic potential is solved on a stretched Cartesianbased tetrahedral mesh. This meshing technique enhances the computational eciency so simulations may be performed to model an entire subscale ion optics and to resolve the eects of the grid apertures and geometric asymmetry. This paper presents detailed results of ion optics simulations and discusses the eects of aperture geometry and operating conditions on direct ion impingement and electron backstreaming.