论文信息 - Determination of thin-film roughness and volume structure parameters from light-scattering investigations

Determination of thin-film roughness and volume structure parameters from light-scattering investigations

Light scattering measurements can be used for determining roughness as well as volume structure parameters of optical thin films. A method of structural analysis is outlined, which allows a quantitative estimation of roughness parameters, mean columnar diameter, packing density, and the evolutionary exponent, respectively.

Angela Duparre | Samer Kassam

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