Near-Infrared Grating Couplers for Silicon Nitride Photonic Wires

Silicon nitride is a promising high-index material for dense photonic circuits and applications in the visible-midinfrared wavelength regime. Design, fabrication, and optical characterization of silicon nitride waveguides at visible-near-infrared wavelength are presented. Finally, design and experimental results are presented for the first time for linear and focused grating couplers (GCs) at near-infrared wavelength (900 nm) for plasma-enhanced chemical vapor deposition silicon nitride wires (220 × 500 nm) and compared with theoretical simulations. An experimental efficiency of 5.7 and 6.5 dB and 1-dB bandwidth of 26 and 40 nm are reported for the linear and focused GCs, respectively.

[1]  Roel Baets,et al.  Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers , 2001 .

[2]  P. Charette,et al.  Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties. , 2008, Optics express.

[3]  T. Krauss,et al.  Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides , 2007, Journal of Lightwave Technology.

[4]  John Gohring,et al.  SERS-based detection in an optofluidic ring resonator platform. , 2007, Optics express.

[5]  Michal Lipson,et al.  High confinement micron-scale silicon nitride high Q ring resonator. , 2009, Optics express.

[6]  A. Knights,et al.  Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides. , 2007, Optics express.

[7]  R. Baets,et al.  Compact efficient broadband grating coupler for silicon-on-insulator waveguides. , 2004, Optics letters.

[8]  Gianluca Piazza,et al.  Aluminum nitride grating couplers. , 2012, Applied optics.

[9]  T. Tsuchizawa,et al.  Low loss mode size converter from 0.3 /spl mu/m square Si wire waveguides to singlemode fibres , 2002 .

[10]  Young-Kai Chen,et al.  Wide Bandwidth Silicon Nitride Grating Coupler , 2010, IEEE Photonics Technology Letters.

[11]  E. Sleeckx,et al.  Highly efficient grating coupler between optical fiber and silicon photonic circuit , 2009, 2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference.

[12]  D Vermeulen,et al.  Bridging the gap between nanophotonic waveguide circuits and single mode optical fibers using diffractive grating structures. , 2010, Journal of nanoscience and nanotechnology.