论文信息 - Mix-and-match lithography and cryogenic etching for NIL template fabrication - 字舞流文

Mix-and-match lithography and cryogenic etching for NIL template fabrication

M. Hofmann | I. Rangelow | S. Sinzinger | E. Manske | M. Holz | L. Weidenfeller | Shraddha Supreeti | Stephan Mechold | C. Reuter