Design and control of a decoupled two degree of freedom translational parallel micro-positioning stage.
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Li-Min Zhu | Guo-Ying Gu | Lei-Jie Lai | Limin Zhu | Guoying Gu | L. Lai
[1] Placid Mathew Ferreira,et al. Design analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage , 2007 .
[2] Jae Jong Lee,et al. Analysis and Design of Linear Parallel Compliant Stage for Ultra-precision Motion Based on 4-PP Flexural joint Mechanism , 2008, 2008 International Conference on Smart Manufacturing Application.
[3] Damrongrit Piyabongkarn,et al. Development of a real-time digital control system with a hardware-in-the-loop magnetic levitation device for reinforcement of controls education , 2003, IEEE Trans. Educ..
[4] Chia-Hsiang Menq,et al. Design, implementation, and control of a six-axis compliant stage. , 2008, The Review of scientific instruments.
[5] Qingze Zou,et al. A review of feedforward control approaches in nanopositioning for high-speed spm , 2009 .
[6] D. Gweon,et al. Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors , 2005 .
[7] Kee-Bong Choi,et al. Monolithic parallel linear compliant mechanism for two axes ultraprecision linear motion , 2006 .
[8] Limin Zhu,et al. High-speed tracking control of piezoelectric actuators using an ellipse-based hysteresis model. , 2010, The Review of scientific instruments.
[9] P. Gao,et al. A new piezodriven precision micropositioning stage utilizing flexure hinges , 1999 .
[10] Layton C. Hale,et al. Optimal design techniques for kinematic couplings , 2001 .
[11] J. Gilman,et al. Nanotechnology , 2001 .
[12] I-Ming Chen,et al. Stiffness modeling of flexure parallel mechanism , 2005 .
[13] Yi Gao,et al. Single incision for trans-peritoneal laparoscopic adrenalectomy in treatment of adrenal tumors: Single incision for trans-peritoneal laparoscopic adrenalectomy in treatment of adrenal tumors , 2009 .
[14] S. S. Aphale,et al. High-bandwidth control of a piezoelectric nanopositioning stage in the presence of plant uncertainties , 2008, Nanotechnology.
[15] Jingyan Dong,et al. Design of high-bandwidth high-precision flexure-based nanopositioning modules , 2009 .
[16] L. Xu,et al. Corrigendum to “A pilose fruit mutant in banana (Musa spp.‘Williams’)” [Sci. Hort. 107 (2006) 315–318] , 2006 .
[17] Jae Jong Lee,et al. Passive compliant wafer stage for single-step nano-imprint lithography , 2005 .
[18] Toru Tojo,et al. Piezoelectrically driven XYθ table for submicron lithography systems , 1989 .
[19] Shorya Awtar,et al. Constraint-based design of parallel kinematic XY flexure mechanisms , 2007 .
[20] Yuen Kuan Yong,et al. Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning , 2009, IEEE Transactions on Nanotechnology.
[21] Kee S. Moon,et al. Optimal design of a flexure hinge based XYφ wafer stage , 1997 .