论文信息 - Electrical characterization of amorphous Al2O3 dielectric films on n-type 4H-SiC - 字舞流文

Electrical characterization of amorphous Al2O3 dielectric films on n-type 4H-SiC

N. Rorsman | M. Winters | E. Sveinbjörnsson | E. B. Thorsteinsson | J. Hassan | R. Karhu | R. Y. Khosa