Temperature–Time Texture Transition of Pb(Zr1−xTix)O3 Thin Films: II, Heat Treatment and Compositional Effects

Texture transition of Pb(Zr1−xTix)O3 thin films grown from a metallo–organic solution onto Pt/Ti/SiO2/Si substrates has been studied. The orientation obtained depends on the crystallization temperature and time and can be drastically altered by modifying the heat treatment schedule. A [100] texture requires an initial seeding treatment in the intermediate temperature range. This is attributed to a nucieation advantage associated with the formation of an intermediate PbO[001] texture that tends to form at intermediate temperature over time. A [111] texture develops at higher temperature during rapid heating and can be rationalized by the formation of an epitaxial intermetallic phase Pt5–7Pb, at the PZT/Pt interface that provides lattice matching between PZT(lll), Pt5–7Pb(lll), and Pt(lll). Temperature–time transformation texture (TTT) diagrams of PZT texture have been constructed for seeding various orientations. The effect of composition (Pb excess and Zr/Ti ratio) and the possible manipulation of these texture selection relations by combining compositional tailoring and heat treatment schedules are illustrated.