Observation of periodic stress produced by ion damage in thin films

Abstract The formation of periodic micro-crinkling, which exhibits a ‘corduroy’ contrast, has been observed in thin films of Pd and Ni after in situ implantation of B, Si, P and Ne at high doses (1016 to 2 × 1017 ions cm−2). This is associated with a macroscopic deformation of the thin film, apparently in the form of periodic bending. This effect increases with increasing dose, until the thin film tears.

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