论文信息 - (Invited) Electrical Characterization of Ge-pFETs with HfO2/TiN Metal Gate: Review of Possible Defects Impacting the Hole Mobility - 字舞流文

(Invited) Electrical Characterization of Ge-pFETs with HfO2/TiN Metal Gate: Review of Possible Defects Impacting the Hole Mobility

Jerome Mitard | Marc Heyns | Marc Meuris | Matty Caymax | Brice De Jaeger | Benjamin Vincent | Geert Eneman | Kristin DeMeyer | Raymond Krom | R. Loo | Thomas Hoffmann | W. Vandervorst