论文信息 - High cooling power density SiGe/Si microcoolers

High cooling power density SiGe/Si microcoolers

SiGe/Si superlattice micro-coolers are investigated experimentally. They can be monolithically integrated with Si-based microelectronic devices to achieve localised cooling and temperature control. Cooling by as much as 4.2 K at 25/spl deg/C and 12 K at 200/spl deg/C was measured on 3 /spl mu/m thick. 60/spl times/60 /spl mu/m/sup 2/ devices. This corresponds to maximum cooling power densities approaching kW/cm/sup 2/.

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