Low contact-force fritting probe card using buckling microcantilevers

Fe report on a new type of micromachinedprobe card which utilizes frittingprocess to make contact to A1 or Cu pads with low contact force smaller than 10 mN Microcantilevers contacting thepadsurface with bucklzng deformation and can keep uniyorm contact force were designed andfabricatea! Mechanicalproperties of the micro-cantilever was measured and a good agreement with theoretical buckling force was obtained Fritting characteristics of the microcantilevers were measured using electrobte condencer as the power source. (t was found that current duration of several milliseconds is enough to cause fritting. The contact resistance of the probe card was measuredto be less than 1 a with contact force of 3 mN Using an atomic force microscop3 probe mar& made on the Cu electrode were measured to be ZOO nm in depth and Z5 pm in width, when the contact force was 10 mA?

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