Readout and Control Electronics for a Microelectromechanical Gyroscope

In this paper, the system-level implementation of readout and control electronics for a microelectromechanical angular velocity sensor will be presented. The sensor element for which the electronics is designed is a bulk micromachined silicon device with electrostatic detection and excitation. The electronics is divided into two parts, analog and digital. Analog electronics is implemented with a 0.7 mum CMOS process that offers high voltage devices and precision analog components. Digital signal processing is implemented with a field-programmable gate array chip. One of the most important system-level nonidealities, the zero-rate output, is analysed, paying attention to its effects on the electronics design. The implemented plusmn100deg/s angular velocity sensor achieves 0.053deg/s/radicHz measured spot noise and 49.9 dB signal-to-noise ratio over the 36 Hz bandwidth, with plusmn4% zero-rate output stability over the temperature range from -40 to +85 degC

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