Ultrahigh resolution photonic crystal nanoprobe for high-density optical data storage, near-field microscopy, and nanolithography systems

In this paper we present the implementation, optimization and commercialization of an ultra-high resolution nano-probe in near field scanning optical microscopy/ spectroscopy (SNOM), nanolithography and high density optical data storage. The theme underlying this effort is the ability to examine or be able to write and/or read ultra fine feature sizes using near field based nano probes. The reason for pursing such research lies in the opportunities it offers for extending the applications of conventional optical microscopy into the nano meter scale domain. Furthermore near-field optical imaging preserves the inherent polarizing, non-invasive, spectroscopic and high temporal resolving capabilities of conventional microscopy, which are absent from other high-resolution techniques

[1]  Sumio Hosaka,et al.  Nano-optical image and probe in a scanning near-field optical microscope , 1999 .

[2]  Sumio Hosaka,et al.  Fabrication of nanostructures using scanning probe microscopes , 1995 .

[3]  Volker Deckert,et al.  Optical spectroscopy and laser desorption on a nanometer scale , 1997 .

[4]  C. Girard,et al.  Theoretical analysis of scanning near‐field optical microscopy , 2008 .

[5]  G. Krausch,et al.  Scanning probe microscopy with “chemical sensitivity” , 1996 .

[6]  Harald Fuchs,et al.  CLASSIFICATION OF SCANNING PROBE MICROSCOPIES (Technical Report) , 1999 .

[7]  Egbert Oesterschulze,et al.  Sensors for scanning probe microscopy , 2003 .

[8]  Kunio Nakajima,et al.  Scanning near-field optical microscopy of fluorescent polystyrene spheres with a combined SNOM and AFM , 1995 .

[9]  J. M. Borrego,et al.  High-resolution scanning microwave electric-field probe for dielectric-constant uniformity measurement , 1990 .

[10]  W. Wiesbeck,et al.  Numerical analysis and optimization of anechoic chambers for EMC testing , 1996 .

[11]  M. Matthews,et al.  A microscope for imaging, spectroscopy, and lithography at the nanometer scale: Combination of a two-photon laser scanning microscope and an atomic force microscope , 2003 .

[12]  Toshiharu Saiki,et al.  Near-field scanning optical microscopy of quantum dot arrays , 2002 .

[13]  Seiji Akita,et al.  Scanning Probe Microscope Lithography of Silicon Using a Combination of a Carbon Nanotube Tip and a Polysilane Film as a Mask , 2002 .

[14]  Hirosato Monobe,et al.  Scanning Near-field Fluorescence Microscopy and Nanoscopic Fluorescence Spectroscopy in Combination with a Non-contact Scanning Force Microscope. , 1994 .

[15]  Kikuo Cho,et al.  Theory of resonant SNOM (scanning near-field optical microscopy): breakdown of the electric dipole selection rule in the reflection mode , 1996 .

[16]  Masahiko Hara,et al.  In Vitro Monitoring of Live Cardiomyocytes Dynamics by a Scanning Near Field Optical Microscope Setup , 1999 .

[17]  Thomas D Milster,et al.  Optical Data Storage , 2022 .

[18]  Igor V. Shvets,et al.  40 nm resolution in reflection-mode SNOM with λ = 685 nm , 1995 .

[19]  D Richards,et al.  The use of a near-field probe for the study of semiconductor heterostructures , 1998 .

[20]  T. D. Harris,et al.  Breaking the Diffraction Barrier: Optical Microscopy on a Nanometric Scale , 1991, Science.

[21]  David N. Batchelder,et al.  Submicron resolution measurement of stress in silicon by near-field Raman spectroscopy , 1998 .

[22]  T. Ataka,et al.  Scanning near-field optical images of ordered polystyrene particle layers in transmission and luminescence excitation modes. , 1997, Optics letters.

[23]  Klaus D. Jandt,et al.  Developments and perspectives of scanning probe microscopy (SPM) on organic materials systems , 1998 .

[24]  S. Schultz,et al.  A scanning near‐field optical microscope for the imaging of magnetic domains in reflection , 1996 .

[25]  William P King,et al.  Scanning probe microscopy. , 1994, Analytical chemistry.

[26]  Heike Dittmar,et al.  Scanning Near‐field Optical Microscope: a Method for Investigating Chromosomes , 1997 .

[27]  H. Fuchs,et al.  Scanning near‐field optical microscopy of a cell membrane in liquid , 2003, Journal of microscopy.

[28]  江刺 正喜 Scanning Probe with an Integrated Diamond Heater Element for Nanolithography , 2003 .

[29]  Shu Wang Near-field optical image of a homogeneous dielectric surface structure: A passive probe model , 1997 .

[30]  Alfred J. Meixner,et al.  Super-resolution imaging and detection of fluorescence from single molecules by scanning near-field optical microscopy , 1995 .

[31]  Armin Lambacher,et al.  Application of a Near‐field Optical Microscope to Investigate the Fluorescence Energy Transfer Between Chromophores Embedded in Langmuir–Blodgett Films , 1997 .

[32]  C. Mirkin,et al.  Fabrication of sub-50-nm solid-state nanostructures on the basis of dip-pen nanolithography , 2003 .

[33]  J. M. Kim,et al.  Near-field optical microscopy with video signal processor to apply a CCD imaging device as a variable area photo-sensor for improving operability and spectrum mode imaging. , 2002, Ultramicroscopy.

[34]  Hirosato Monobe,et al.  Application of scanning near-field optical microscopy to thin organic film devices , 1998 .

[35]  WUHuimeng,et al.  Progress in materials and technologies for ultrahigh density data storage , 2003 .

[36]  Gerd Kaupp,et al.  Chemical contrast in scanning near‐field optical microscopy , 1997 .

[37]  G. Michael Morris,et al.  DIFFRACTIVE SUPERRESOLUTION ELEMENTS , 1997 .

[38]  A. J. Ward,et al.  The theory of SNOM: A novel approach , 1997 .

[39]  Bruce D. Terris,et al.  Near‐field optical data storage using a solid immersion lens , 1994 .

[40]  Sergey Kostritskii,et al.  Optical near-field measurements of guided modes in various processed LiNbO3 and LiTaO3 channel waveguides , 2003 .

[41]  M. Isaacson,et al.  Resolution in near-field optical microscopy , 1992 .

[42]  Egbert Oesterschulze,et al.  Monolithic gallium arsenide cantilever for scanning near-field microscopy , 1998 .

[43]  J. Barenz,et al.  Spatially resolved near-field spectroscopy on localized GaInAsP/InP double heterostructures , 1998 .

[44]  Stephen R. Leone,et al.  Transmission near-field scanning microscope for infrared chemical imaging , 1999 .

[45]  Pierre-Michel Adam,et al.  Near Field Optical Microscopy and Spectroscopy with STM and AFM Probes , 1998 .

[46]  Satoshi Kawata,et al.  Photorefractive optics in three-dimensional digital memory , 1999, Proc. IEEE.

[47]  David Klenerman,et al.  Scanning near-field optical microscopy in reflection mode imaging in liquid , 1997 .

[48]  M Kato,et al.  Fabrication and observation of a standard sample for near‐field optical microscopy , 1999, Journal of microscopy.

[49]  Terry W. McDaniel,et al.  Optical data storage media , 1996, IBM J. Res. Dev..

[50]  Din Ping Tsai,et al.  Optical characterization of visible multiquantum-well semiconductor lasers by collection/excitation modes of scanning near-field optical microscopy , 1999 .

[51]  S. Bukofsky,et al.  Application of near-field optics to critical dimension metrology , 1996, Conference Proceedings LEOS'96 9th Annual Meeting IEEE Lasers and Electro-Optics Society.

[52]  B. Klehn,et al.  Nanolithography with an atomic force microscope by means of vector-scan controlled dynamic plowing , 1999 .

[53]  John C. Roberts,et al.  Optical memory effect in GaN epitaxial films , 1997 .

[54]  Carlo Coluzza SPECTROMICROSCOPY AND CHEMICAL IMAGING APPLIED TO THE STUDY OF PHOTOCATHODE MATERIALS AND DEVICES , 1997 .

[55]  E Oesterschulze,et al.  Coaxial probes for scanning near‐field microscopy , 1999, Journal of microscopy.

[56]  D. V. Kazantsev,et al.  A simple scanning head for scanning near-field optical microscope , 1998 .

[57]  Sergey I. Bozhevolnyi,et al.  Near-field optical microscopy of fractal structures , 1999 .

[58]  Harald Fuchs,et al.  Super-Resolution Scanning Near-Field Optical Microscopy , 2003 .

[59]  Olivier J. F. Martin,et al.  Light Confinement By Subwavelength Objects In Near-Field Optics , 1995 .

[60]  N. F. van Hulst,et al.  Near‐field optical microscopy in transmission and reflection modes in combination with force microscopy , 1993 .

[61]  Klaus Sattler,et al.  Nanolithography Using the Scanning Tunneling Microscope , 2003 .

[62]  H. Alan Schwettman,et al.  IR microscopy with a transient photo-induced near-field probe (tipless near-field microscopy) , 1998 .

[63]  Levi A. Gheber,et al.  Design and optimization of a near-field scanning optical microscope for imaging biological samples in liquid. , 1998, Applied optics.

[64]  Kikuo Cho,et al.  Study of Scanning Near-Field Optical Microscopy (SNOM) by Nonlocal Response Theory , 1995 .

[65]  Der-Ray Huang,et al.  Near-Field Recording Head with Simple Tracking Design , 1999 .

[66]  F. Keilmann,et al.  Scanning microscopy by mid-infrared near-field scattering , 1998 .

[67]  Olivier J. F. Martin,et al.  Optical Microscopy in the Nano-World , 1997 .

[68]  R. Pylkki,et al.  Scanning Near-Field Optical Microscopy and Scanning Thermal Microscopy , 1994 .

[69]  Thomas R Huser,et al.  Scanning near-field optical microscopy (SNOM) and its application in mineralogy , 1995 .

[70]  Michel Spajer,et al.  Reflection scanning near-field optical microscopy (R-SNOM) in constant height mode with a dielectric probe image interpretation and resolution for high topographic variations , 1998 .

[71]  Fabienne D. Marquis-Weible,et al.  Reduction of tip–sample interaction forces for scanning near-field optical microscopy in a liquid environment , 1998 .

[72]  Y. Martin,et al.  Optical data storage read out at 256 Gbits/in.2 , 1997 .

[73]  N. F. van Hulst,et al.  An Evanescent Field Optical Microscope , 1991 .

[74]  Lukas Novotny,et al.  Forbidden light scanning near‐field optical microscopy , 1995 .

[75]  Hiroshi Iwasaki,et al.  Nanolithography on SiO2/Si with a scanning tunnelling microscope , 2003 .

[76]  D. Rugar,et al.  High density data storage based on the atomic force microscope , 1998, Seventh Biennial IEEE International Nonvolatile Memory Technology Conference. Proceedings (Cat. No.98EX141).

[77]  Suguru Sangu,et al.  Nanophotonics: design, fabrication, and operation of nanometric devices using optical near fields , 2002 .

[78]  E. Paule,et al.  Near-field optical microscopy: A numerical study of resolution and contrast , 1998 .

[79]  Ishwar D. Aggarwal,et al.  First experimental results with the free electron laser coupled to a scanning near-field optical microscope , 1998 .

[80]  Brian Joseph Mangan,et al.  Near-field optical microscopy of thin photonic crystal films. , 1999 .

[81]  Bruce D. Terris,et al.  Near‐field optical data storage , 1996 .

[82]  Vahid Sandoghdar,et al.  Prospects of apertureless SNOM with active probes , 1999 .

[83]  S. Kirstein,et al.  Scanning near-field optical microscopy , 1999 .

[84]  Jean-Pol Vigneron,et al.  Theory of near-field optics with applications to SNOM and optical binding , 1991 .

[85]  Marco Giordano,et al.  Sub-Micron Scale Optical Read/Write/Erase on Azo-Polymethacrylate Thin Films by Scanning Near-Field Optical Microscopy , 2003 .

[86]  Kunio Nakajima,et al.  Polarization properties of light emitted by a bent optical fiber probe and polarization contrast in scanning near-field optical microscopy , 1998 .

[87]  Pierre-Michel Adam,et al.  Apertureless near-field optical microscope in reflection and transmission modes , 1998 .

[88]  Jan Grochmalicki,et al.  Super-resolution in optical data storage , 1999 .

[89]  Dominique Barchiesi,et al.  Spectroscopic study of resonant dielectric structures in near-field , 1999 .

[90]  Shuming Nie,et al.  Near-Field Surface-Enhanced Raman Spectroscopy on Single Silver Nanoparticles , 1997 .

[91]  Motoharu Shichiri,et al.  Nano-scale imaging of chromosomes and DNA by scanning near-field optical/atomic force microscopy. , 2003, Ultramicroscopy.

[92]  Shinichiro Iwabuchi,et al.  Scanning near-field optical/atomic force microscopy for fluorescence imaging and spectroscopy of biomaterials in air and liquid: Observation of recombinantEscherichia coli with gene coding to green fluorescent protein , 1996 .

[93]  Paul Pantano,et al.  Nanotip array photoimprint lithography , 1999 .

[94]  A. Meixner,et al.  Scanning near-field optical microscopy in cell biology and microbiology. , 1998, Cellular and molecular biology.

[95]  D. W. Pohl Neat Field Optics: Comeback of Light in Microscopy , 1998 .

[96]  A. H. Klahn,et al.  References and Notes , 2022 .