Resonant magnetic field microsensors in standard CMOS technology

In this paper micromachined sensors for the estimation of magnetic field are presented. These devices have been realized through a MEMS technology based on a standard CMOS process coupled with an IC compatible post-processing phase. Different mechanical structures have been realized and studied. In particular the resonant working mode of the system has been taken into account. Particular attention has been devoted to the characterization of the interfering input effects Suitable models have been defined to allow meaningful numerical simulation of the electro-mechanical device.