An easy fabrication process of fully-sealed parylene microfluidic channels with a single deposition step

[1]  W. Lang,et al.  Design and fabrication of multi-contact flexible silicon probes for intracortical floating implantation , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[2]  H. Kulah,et al.  A parylene coating based room temperature wafer-level attachment method for MEMS integration with zero applied force , 2014 .

[3]  Jeffrey A. Loeb,et al.  A hybrid silicon-parylene neural probe with locally flexible regions , 2014 .

[4]  Abbas Z. Kouzani,et al.  Integrated microfluidic drug delivery devices: a component view , 2013 .

[5]  Akhlesh Lakhtakia,et al.  Front Matter: Volume 8339 , 2012 .

[6]  Akhlesh Lakhtakia,et al.  Toward bioinspired parylene-C coatings of implant surfaces , 2012, Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

[7]  Roland Zengerle,et al.  A floating 3D silicon microprobe array for neural drug delivery compatible with electrical recording , 2011 .

[8]  M. Gijs,et al.  Low temperature Pyrex/silicon wafer bonding via a single intermediate parylene layer , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[9]  André Mercanzini,et al.  Microfabricated Cortical Neuroprostheses , 2011 .

[10]  Jeffrey A. Loeb,et al.  Microfabrication of 3D neural probes with combined electrical and chemical interfaces , 2010 .

[11]  T. Stieglitz,et al.  Characterization of parylene C as an encapsulation material for implanted neural prostheses. , 2010, Journal of biomedical materials research. Part B, Applied biomaterials.

[12]  M.S. Humayun,et al.  Microfabricated Implantable Parylene-Based Wireless Passive Intraocular Pressure Sensors , 2008, Journal of Microelectromechanical Systems.

[13]  Y. Tai,et al.  Monolithic fabrication of three-dimensional microfluidic networks for constructing cell culture array with an integrated combinatorial mixer , 2008 .

[14]  Vikramaditya G. Yadav,et al.  Cell and protein compatibility of parylene-C surfaces. , 2007, Langmuir : the ACS journal of surfaces and colloids.

[15]  S. Takeuchi,et al.  Fabrication of Flexible Neural Probes With Built-In Microfluidic Channels by Thermal Bonding of Parylene , 2006, Journal of Microelectromechanical Systems.

[16]  Arun Majumdar,et al.  Parylene micro membrane capacitive sensor array for chemical and biological sensing , 2006 .

[17]  K. Najafi,et al.  Characterization of low-temperature wafer bonding using thin-film parylene , 2005, Journal of Microelectromechanical Systems.

[18]  Yu-Chong Tai,et al.  Parylene-strengthened thermal isolation technology for microfluidic system-on-chip applications , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[19]  K. Mabuchi,et al.  Parylene flexible neural probes integrated with microfluidic channels. , 2005, Lab on a chip.

[20]  Jun Xie,et al.  Surface micromachined electrostatically actuated micro peristaltic pump. , 2004, Lab on a chip.

[21]  Hong-Seok Noha,et al.  Parylene micromolding, a rapid and low-cost fabrication method for parylene microchannel , 2004 .

[22]  P. Renaud,et al.  Flexible polyimide probes with microelectrodes and embedded microfluidic channels for simultaneous drug delivery and multi-channel monitoring of bioelectric activity. , 2004, Biosensors & bioelectronics.

[23]  W. R. Dolbier,et al.  Parylene-AF4: a polymer with exceptional dielectric and thermal properties , 2003 .

[24]  John F. McDonald,et al.  Parylene as a conformal insulator for submicron multilayer interconnection , 1993, Other Conferences.

[25]  G. Loeb,et al.  Parylene as a Chronically Stable, Reproducible Microelectrode Insulator , 1977, IEEE Transactions on Biomedical Engineering.

[26]  M. Vellekoop,et al.  ON-CHIP STORAGE OF DROPLETS IN PARYLENE-AF4 COATED PDMS CHANNELS , 2014 .

[27]  Joyce Laird,et al.  The right coat for effective protection , 2013 .