Underwater Imaging Using a 1 × 16 CMUT Linear Array

A 1 × 16 capacitive micro-machined ultrasonic transducer linear array was designed, fabricated, and tested for underwater imaging in the low frequency range. The linear array was fabricated using Si-SOI bonding techniques. Underwater transmission performance was tested in a water tank, and the array has a resonant frequency of 700 kHz, with pressure amplitude 182 dB (μPa·m/V) at 1 m. The −3 dB main beam width of the designed dense linear array is approximately 5 degrees. Synthetic aperture focusing technique was applied to improve the resolution of reconstructed images, with promising results. Thus, the proposed array was shown to be suitable for underwater imaging applications.

[1]  Rui Zhang,et al.  Design of capacitive micromachined ultrasonic transducer (CMUT) linear array for underwater imaging , 2016 .

[2]  D. Mills,et al.  Real-time in-vivo imaging with capacitive micromachined ultrasound transducer (cMUT) linear arrays , 2003, IEEE Symposium on Ultrasonics, 2003.

[3]  Chia‐Hung Liu,et al.  Surface micromachined capacitive ultrasonic transducer for underwater imaging , 2007 .

[4]  T Olofsson,et al.  Synthetic aperture focusing of ultrasonic data from multilayered media using an omega-K algorithm , 2011, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[5]  Jing Miao,et al.  Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications , 2015, Sensors.

[6]  A. Nikoozadeh,et al.  Volumetric real-time imaging using a CMUT ring array , 2012, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[7]  Chenyang Xue,et al.  Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient , 2015 .

[8]  W. Peake,et al.  The Lowest Resonant Frequency of a Water‐Loaded Circular Plate , 1954 .

[9]  C. A. Rich,et al.  Modeling and Characterization of CMOS-Fabricated Capacitive Micromachined Ultrasound Transducers , 2011, Journal of Microelectromechanical Systems.

[10]  Chenyang Xue,et al.  Design and performance analysis of capacitive micromachined ultrasonic transducer (CMUT) array for underwater imaging , 2016 .

[11]  Chenyang Xue,et al.  Design and Analysis of Capacitive Micromachined Ultrasonic Transducers Based on SU-8 , 2015 .

[12]  Peter Grant,et al.  A Digital Synthetic Focus Acoustic Imaging System for NDE , 1978 .

[13]  Lúcia Valéria Ramos de Arruda,et al.  A Sparse Reconstruction Algorithm for Ultrasonic Images in Nondestructive Testing , 2015, Sensors.

[14]  D. Hutchins,et al.  Imaging using air-coupled polymer-membrane capacitive ultrasonic arrays. , 2004, Ultrasonics.

[15]  B. Khuri-Yakub,et al.  Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging? , 2002, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[16]  B.T. Khuri-Yakub,et al.  Finite element analysis of underwater capacitor micromachined ultrasonic transducers , 2002, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[17]  A. F. Sarioglu,et al.  Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers , 2014, Journal of micromechanics and microengineering : structures, devices, and systems.

[18]  Massimo Pappalardo,et al.  Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging , 2006, Microelectron. J..

[19]  B. Khuri-Yakub,et al.  Surface micromachined capacitive ultrasonic transducers , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[20]  Douglas A. Buchanan,et al.  Multiple Moving Membrane CMUT With Enlarged Membrane Displacement and Low Pull-Down Voltage , 2013, IEEE Electron Device Letters.

[21]  J. R. Frederick,et al.  Improved ultrasonic nondestructive testing of pressure vessels , 1979 .

[22]  Douglas A. Buchanan,et al.  A novel 6 × 6 element MEMS capacitive ultrasonic transducer with multiple moving membranes for high performance imaging applications , 2015 .

[23]  Ark-Chew Wong,et al.  VHF microelectromechanical mixer -filters. , 2001 .

[24]  Butrus T. Khuri-Yakub,et al.  Capacitive Micromachined Ultrasonic Transducers: Theory and Technology , 2003 .

[25]  Chenyang Xue,et al.  Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array , 2014, Micromachines.

[26]  Dong-Kyun Kim,et al.  Performance and reliability of new CMUT design with improved efficiency , 2013 .

[27]  Pai-Chi Li,et al.  A Miniature Capacitive Ultrasonic Imager Array , 2009, IEEE Sensors Journal.