论文信息 - Capacitive Pressure Sensor With Very Large Dynamic Range

Capacitive Pressure Sensor With Very Large Dynamic Range

A new capacitive pressure sensor with very large dynamic range is introduced. The sensor is based on a new technique for substantially changing the surface area of the electrodes, rather than the inter-electrode spacing as commonly done at the present. The prototype device has demonstrated a change in capacitance of approximately 2500 pF over a pressure range of 10 kPa.

E. Bakhoum | M. Cheng | E.G. Bakhoum | M.H.M. Cheng

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