Simple micropositioning devices for STM

Abstract Two micropositioning devices have been developed, one for high resolution STM-tip control. and the other for coarse positioning purposes. The devices are based on piezoelectric plates capable of three-dimensional deformation when voltages are applied to a suitable electrode configuration. The rough positioning device operates by controlled change between gliding and sticking of an object on a surface. The devices were combined on a vibration isolation unit to form a STM. Performance of the entire STM was tested with profilometry on a gold surface.