Apparatus and method for classifying and diagnosing fault in semiconductor processing

The present invention discloses an apparatus and method for classifying and diagnosing sensor data in a semiconductor process. According to an embodiment of the present invention, an apparatus for classifying and diagnosing sensor data in a semiconductor process includes a local feature extractor that sequentially moves a receptive field on a time axis only in an input layer of sensor data, A local feature collection unit for collecting local features; A one-dimensional feature map extractor for extracting one-dimensional feature maps from the collected local features to generate a convolution layer; And a data classifier for classifying the sensor data based on the generated convolution layer, wherein the one axis of the receptive field is a size corresponding to a variable axis of the input layer, .