High-power excimer laser and application

A high power XeCl and KrF excimer lasers pumped by an intense relativistic electron beam have been developed. The pump power density ranges between 1.5 to 2.0 MW/cm3. The maximum output energy of 136 J with the peak power of 1.5 GW is obtained for the XeCl laser. In KrF laser case, the maximum output energy is 157 J and the peak power 2.0 GW. The UV laser interaction with some materials has been studied by this excimer laser.