Total quantitative recording of elemental maps and spectra with a scanning microprobe

A system of data recording and analysis has been developed by means of which simultaneously all data from a scanning instrument such as a microprobe can be quantitatively recorded and permanently stored, including spectral outputs from several detectors. Only one scanning operation is required on the specimen. Analysis is then performed on the stored data, which contain quantitative information on distributions of all elements and spectra of all regions.