High Scale-Factor Stability Frequency-Modulated MEMS Gyroscope: 3-Axis Sensor and Integrated Electronics Design

This paper reports the developments toward an integrated, tri-axial, frequency-modulated, consumer-grade, and microelectromechanical system (MEMS) gyroscope. A custom low-power (160 <italic>μ</italic>A), low-phase-noise integrated circuit is designed specifically for frequency-modulated operation. Both yaw- and pitch-rate sensing systems are demonstrated by coupling the circuit with two novel micromachined structures fabricated with a 24-<italic> μ</italic>m-thick industrial process. In operation, both gyroscopes show a repeatable and stable scale factor, with less than 0.55% of part-to-part variability, obtained with no any calibration, and 35 ppm/<inline-formula> <tex-math notation="LaTeX">$^{\circ }$</tex-math></inline-formula>C of variability over a 25–70  <inline-formula><tex-math notation="LaTeX">$^{\circ }$</tex-math></inline-formula>C temperature range.

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