Gas-discharge plasma application for ion-beam treatment of the holes’ inner surfaces

The possibility to modify the holes and pipes’ inner surface with focused high-intensity low-energy ion beams was first shown in this work. The studies were carried out using an axially symmetric single-grid system for the ions’ extraction from a free plasma boundary with subsequent ballistic focusing of the ion beam. Ion implantation of the inner surface was carried out in the region of the ion beam defocusing. The studies considered the effect of a nitrogen ions’ beam with energy of 1.4 keV on the inner surface of a tube with a diameter of 20 mm made of stainless steel AISI 321. The beams were formed with a repetition rate of 40 kHz and pulse durations of 5, 7.5 and 10 μs. It is shown that the mutual deposition of the sputtered material on the tube’ opposite sides partly compensates for ion sputtering. As a result of implantation of the inner surface of a pipe made of stainless steel AISI 321, the nitride layers with a thickness of more than 15 microns with a nitrogen dopant content of 22-30 at.% were obtained.

[1]  E. Oks,et al.  Influence of the aluminum ion implantation dose on the phase composition of submicrocrystalline titanium , 2021, Vacuum.

[2]  R. Sun,et al.  Research and progress of laser cladding on engineering alloys: A review , 2021 .

[3]  Ding-shun She,et al.  Effects of Titanium-Implanted Dose on the Tribological Properties of 316L Stainless Steel , 2021, Materials.

[4]  O. Korneva,et al.  Modification of the microstructure and properties of martensitic steel during ultra-high dose high-intensity implantation of nitrogen ions , 2020 .

[5]  A. Ryabchikov Progress in low energy high intensity ion implantation method development , 2020 .

[6]  A. Shevelev,et al.  Formation of repetitively pulsed high-intensity, low-energy silicon ion beams , 2020 .

[7]  A. Shevelev,et al.  Surface modification of Al by high-intensity low-energy Ti-ion implantation: Microstructure, mechanical and tribological properties , 2019, Surface and Coatings Technology.

[8]  A. Shevelev,et al.  Low energy, high intensity metal ion implantation method for deep dopant containing layer formation , 2018, Surface and Coatings Technology.

[9]  A. Shevelev,et al.  High intensity, low ion energy implantation of nitrogen in AISI 5140 alloy steel , 2018, Surface and Coatings Technology.

[10]  A. Shevelev,et al.  High intensity metal ion beam generation , 2017 .

[11]  N. Koval,et al.  Effect of thermionic cathode heating current self-magnetic field on gaseous plasma generator characteristics. , 2015, The Review of scientific instruments.

[12]  K. Tkachenko,et al.  Structural-phase changes in surface layers of elements made of VT6 titanium alloy under irradiation by high-current pulsed electron beam , 2013, Inorganic Materials: Applied Research.

[13]  C. Dong,et al.  Surface treatment by high current pulsed electron beam , 2003 .

[14]  S. Fortuna,et al.  Formation of intermetallic layers at high intensity ion implantation , 2002 .

[15]  Weihua Jiang,et al.  MATERIALS PROCESSING WITH INTENSE PULSED ION BEAMS , 1996 .

[16]  Xian-qing Xie,et al.  The microstructure and tribological properties of M50 steel surface after titanium ion implantation , 2021 .

[17]  A. Ryabchikov,et al.  Obtaining molybdenum-99 in the IRT-T research reactor using resonance neutrons , 2004 .

[18]  André Anders,et al.  Handbook of plasma immersion ion implantation and deposition , 2004 .