论文信息 - Mathematical model for a micromachined accelerometer

Mathematical model for a micromachined accelerometer

A mathematical model is developed for both open- and closed-loop accelerometers having capacitive sensing and electrostatic feedback. Test results on actual micromachined devices are compared with simulation employing the mathematical model.

Michael Kraft | Christopher P. Lewis | Thomas G. Hesketh

[1] Wang Ping,et al. On modelling the dynamic non-linearity of force-balance accelerometers (FBAs) , 1994 .

[2] Josep Samitier,et al. Analysis of electrostatic-damped piezoresistive silicon accelerometers , 1993 .

[3] M. Usher,et al. The design of miniature wideband seismometers , 1978 .

[4] W. Sansen,et al. A highly symmetrical capacitive micro-accelerometer with single degree-of-freedom response , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[5] H. Jerman,et al. Wide dynamic range direct accelerometer , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[6] H. Riedel,et al. Capacitive silicon accelerometer with highly symmetrical design , 1990 .

[7] R. Wolffenbuttel,et al. Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer , 1994 .