Modification of Carbon Nanotube Templates Using Femtosecond Laser Pulses

Selective modification of carbon nanotubes (CNTs) on Si substrates was performed using a femtosecond laser. The high shock wave generated by the femtosecond laser effectively removed the CNTs without damage to the Si substrate. This process has many advantages because it is performed without chemicals and is easily applied to large-area patterning. The CNTs grown by plasma-enhanced chemical vapor deposition (PECVD) have a catalyst cap at the end of the nanotube due to the tip-growth mode mechanism. For the application of an electron emission and a bio sensor, the catalyst cap is usually chemically removed, which damages the surface of the wall of the CNTs. However, precise control of the femtosecond laser power and focal position can solve this problem. Furthermore, selective cutting of carbon nanotube using a femtosecond laser does not cause any phase change in the CNTs, as usually shown in focused ion beam irradiation of the CNTs.