论文信息 - Floating-potential self-assembly of singe-walled carbon nanotube field effect transistors by ac-dielectrophoresis

Floating-potential self-assembly of singe-walled carbon nanotube field effect transistors by ac-dielectrophoresis

An improved method for self-assembly fabrication of single-walled carbon nanotube (SWCNT) field effect transistors (FETs) is presented, combining the unique design of biased/floating potential electrode geometry and the technique of aligning CNTs by pre-defined trenches in ''Sandwich''-like resist layers. Super-aligned SWCNT FETs bridging biased/floating potential electrode pairs with precisely controlled location can be demonstrated. Moreover, SWCNT FETs fabricated by this method exhibit excellent electrical properties, such as I"o"n/I"o"f"f ratio up to 10^5 and sub-threshold slope ~130mV/dec. This novel technique provides a more effective and flexible way to solve the CNT assembly issue. It could also enable the fabrication of future CNT based complementary logic circuit and nano-electrical-mechanical-system (NEMS).

[1] Horst Hahn,et al. Ultra-large-scale directed assembly of single-walled carbon nanotube devices. , 2007, Nano letters.

[2] T. Choi,et al. A Dielectrophoretic Method for High Yield Deposition of Suspended, Individual Carbon Nanotubes with Four-Point Electrode Contact , 2007 .

[3] P. B. Allen,et al. Nanocrystalline nanowires: I. Structure. , 2007, Nano letters.

[4] Pierre Legagneux,et al. Advantages of top-gate, high-k dielectric carbon nanotube field-effect transistors , 2006 .

[5] R. Krupke,et al. Surface Conductance Induced Dielectrophoresis of Semiconducting Single-Walled Carbon Nanotubes , 2004 .

[6] Jing Guo,et al. Carbon Nanotube Field-Effect Transistors with Integrated Ohmic Contacts and High-κ Gate Dielectrics , 2004 .

[7] Heiko B. Weber,et al. Simultaneous Deposition of Metallic Bundles of Single-walled Carbon Nanotubes Using Ac-dielectrophoresis , 2003 .

[8] Irving P. Herman,et al. Precise positioning of single-walled carbon nanotubes by ac dielectrophoresis , 2006 .

[9] Bingchu Cai,et al. Ionization gas sensing in a microelectrode system with carbon nanotubes , 2006 .