A Small-Size Ultrasonic Linear Motor
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A new structure for an ultrasonic linear motor using piezoelectric actuators has been developed. The ultrasonic vibrator consists of a metal bar with two legs. The direction of the slider's movement is controlled by changing the polarity of the drive voltage of the multilayered piezoelectric actuator. Typical performance characteristics of the linear motor are a velocity of 1 m/s and a static thrust of 100 gf.
[1] Kenji Uchino,et al. Ultrasonic Linear Motors Using Piezoelectric Actuators , 1988 .