Tunable Bandstop and Bandpass MEMS Filters for Millimeter Wave Applications

This paper addresses the design and modeling of millimeter wave tunable filters using CoPlanar Waveguide (CPW) quarter wavelength stubs and MEMS (Micro-Electro-Mechanical-Systems) switches. In order to design bandstop and bandpass tunable MEMS filters an accurate design methodology based on the transmission line theory is presented. The tunable behavior is achieved using original MEMS switches: Two Cantilever Shunt Switch (TCSS). The overall structures, including TCSS, have been manufactured using dielectric membrane, in order to minimize the insertion losses. The obtained simulation and experimental results confirm the accuracy of the proposed design methodology and indicates very good performances in millimeter wave band.