Advanced photomask repair technology for 65nm lithography (4)

Yasutoshi Itou, Yoshiyuki Tanaka, Osamu Suga *Yasuhiko Sugiyama, *Ryoji Hagiwara, *Haruo Takahashi, *Osamu Takaoka, *Tomokazu Kozakai, *Osamu Matsuda, *Katsumi Suzuki, *Mamoru Okabe, *Syuichi Kikuchi, *Atsushi Uemoto, *Anto Yasaka, *Tatsuya Adachi, **Naoki Nishida Semiconductor Leading Edge Technologies, Inc. 16-1, Onogawa, Tsukuba-shi, Ibaraki, 305-8569, Japan *SII NanoTechnorogy Inc. 36-1 Takenoshita, Oyama-cho, Sunto-gun, Shizuoka, 410-1393, Japan **HOYA Co. 1375 Kawaguchi-cho, Hachioji-shi, Tokyo, 193-8525, Japan