论文信息 - Crucial role of reactive pulse-gas on a sputtered Zn3N2 thin film formation - 字舞流文

Crucial role of reactive pulse-gas on a sputtered Zn3N2 thin film formation

J. Nukeaw | P. Eiamchai | M. Horprathum | C. Chananonnawathorn | H. Nakajima | P. Kasamechonchung | N. Khemasiri | A. Klamchuen | T. Boonkoom | S. Jessadaluk | Kittipong Tantisantisom | A. Pankiew | S. Pornthreeraphat | Sirajit Vuttivong | Prayoon Songsiririthigul