Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
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J. Freitas | V. Wheeler | C. Eddy | S. Qadri | N. Nepal | S. Walton | D. Boris | J. Avila
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J. Freitas | V. Wheeler | C. Eddy | S. Qadri | N. Nepal | S. Walton | D. Boris | J. Avila