论文信息 - Vaporized-metal cluster formation and effect of kinetic energy of ionized clusters on film formation - 字舞流文

Vaporized-metal cluster formation and effect of kinetic energy of ionized clusters on film formation

H. Usui | T. Takagi | I. Yamada | H. Inokawa | H. Takaoka | S. C. Cheng

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[2] T. Takagi,et al. Characteristics of thin films formed by the ionized-cluster beam technique , 1978 .

[3] T. Takagi,et al. An evaluation of metal and semiconductor films formed by ionized-cluster beam deposition , 1976 .