Standing Wave Binding of Hemispherical Resonator Containing First–Third Harmonics of Mass Imperfection under Linear Vibration Excitation

Due to complicated processing technology, the mass distribution of a hemispherical resonator made of fused silica is not uniform, which can affect the azimuth of the standing wave of a resonator under the linear vibration excitation. Therefore, the analysis of standing wave evolution of a resonator with mass imperfection under linear vibration excitation is of significance for the improvement of the output accuracy of a gyroscope. In this paper, it is assumed that the resonator containing the first–third harmonics of mass imperfection is excited by horizontal and vertical linear vibration, respectively; then, the equations of motion of an imperfect resonator under the second-order vibration mode are established by the elastic thin shell theory and Lagrange mechanics principle. Through error mechanism analysis, it is found that, when the frequency of linear vibration is equal to the natural frequency of resonator, the standing wave is bound in the azimuth of different harmonics of mass imperfection with the change in vibration excitation direction. In other words, there are parasitic components in the azimuth of the standing wave of a resonator under linear vibration excitation, which can cause distortion of the output signal of a gyroscope. On the other hand, according to the standing wave binding phenomenon, the azimuths of the first–third harmonics of mass imperfection of a resonator can also be identified under linear vibration excitation, which can provide a theoretical method for the mass balance of an imperfect resonator.

[1]  J. Hedley,et al.  Electrostatic correction of structural imperfections present in a microring gyroscope , 2005, Journal of Microelectromechanical Systems.

[2]  Andrei M. Shkel,et al.  Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators , 2014, Journal of Microelectromechanical Systems.

[3]  Allan Y. Lee,et al.  In-flight Characterization of Cassini Inertial Reference Units , 2007 .

[4]  Dacheng Xu,et al.  A high symmetry polysilicon micro hemispherical resonating gyroscope with spherical electrodes , 2017, 2017 IEEE SENSORS.

[5]  Chen Zhihua,et al.  A fast identification method for mode offset angle of cupped wave gyroscope , 2011 .

[6]  D. Meyer,et al.  Milli-HRG inertial navigation system , 2012, Proceedings of the 2012 IEEE/ION Position, Location and Navigation Symposium.

[7]  R.T. M'Closkey,et al.  Frequency tuning of a disk resonator gyro via mass matrix perturbation , 2008, 2008 American Control Conference.

[8]  G. Remillieux,et al.  HRG and marine applications , 2014 .

[9]  C. Wang,et al.  Motion equations of hemispherical resonator and analysis of frequency split caused by slight mass non-uniformity , 2020 .

[10]  M. A. Basarab,et al.  Balancing of hemispherical resonator gyros by chemical etching , 2015 .

[11]  C. Nguyen,et al.  Location-dependent frequency tuning of vibrating micromechanical resonators via laser trimming , 2004, Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004..

[12]  Craig A. Rogers,et al.  THE INFLUENCE OF CONTROL SYSTEM DESIGN ON THE PERFORMANCE OF VIBRATORY GYROSCOPES , 2002 .

[13]  Xiaomei Wu,et al.  Investigation on standing wave vibration of the imperfect resonant shell for cylindrical gyro , 2012 .

[14]  Farrokh Ayazi,et al.  A Polysilicon Microhemispherical Resonating Gyroscope , 2014, Journal of Microelectromechanical Systems.

[15]  Xiang Xi,et al.  A Simple Acoustic Method for Modal Parameter Measurement of the Resonator for Vibratory Shell Gyroscope , 2014, IEEE Sensors Journal.

[16]  R. Bishop Mechanical Vibration , 1958, Nature.

[17]  Yonglei Jia,et al.  Decreasing Frequency Splits of Hemispherical Resonators by Chemical Etching , 2018, Sensors.

[18]  Jung-Hwan Kim,et al.  Trimming of imperfect hemispherical shell including point mass distributions , 2017 .

[19]  Xin Zhou,et al.  Frequency Tuning of a Disk Resonator Gyroscope via Stiffness Perturbation , 2017, IEEE Sensors Journal.

[20]  C.H.J. Fox,et al.  A simple theory for the analysis and correction of frequency splitting in slightly imperfect rings , 1990 .

[21]  Zhen Fang,et al.  Force to Rebalance Control of HRG and Suppression of Its Errors on the Basis of FPGA , 2011, Sensors.

[22]  Yi Tao,et al.  Precision balance method for cupped wave gyro based on cup-bottom trimming , 2012 .

[23]  Ji-Hwan Kim,et al.  Natural frequency split estimation for inextensional vibration of imperfect hemispherical shell , 2011 .