A MEMS Non-interferometric Differential Confocal Scanning Optical Microscope

This paper describes a novel microelectromechanical system (MEMS) non-interferometric differential confocal scanning optical microscope. It consists of a single mode fiber aperture, a 450×450 µm2 2-D scanner, and a 1.8-mm-diameter graded index objective lens. We have acheived a lateral resolution of 1.6 µm and a field of view of 60×60 µm2. A depth resolution of 0.6 µm is achieved in differential mode. The MEMS confocal microscpe is very compact and suitable for endoscopic imaging applications.

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