A CONTROL METHODOLOGY FOR AN INCHWORM PIEZOMOTOR

This paper describes a control methodology developed for an inchworm-type precision piezomotor. The report presents a motor designed based on the classical inchworm principle and a dynamical model of the motor. A hybrid control method that consists of a traditional PID controller and a rule-based scheme is developed and the controller is shown to offer good performance when tracking sinusoidal and arbitrary signals.