论文信息 - Thermal impedance plots of micro-scaled devices

Thermal impedance plots of micro-scaled devices

The complex thermal impedance Zth of a microelectronic heat source on the surface of a silicon wafer has been calculated semi-analytically as a function of the frequency. By representing the results in a Nyquist plot, almost perfect circular curves are obtained. This result is analogous to complex loci of the dielectric constant obtained for some materials.

Gilbert De Mey | Bjorn Vermeersch | G. Mey | B. Vermeersch

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