论文信息 - Liquid Core ARROW Waveguides by Atomic Layer Deposition

Liquid Core ARROW Waveguides by Atomic Layer Deposition

We report on the use of the atomic layer deposition (ALD) process for fabricating liquid core antiresonant reflecting optical waveguides (ARROWs). The ALD permits the deposition of a very conformal sub-100-nm titanium dioxide antiresonant layer. This results in a low loss liquid core ARROW waveguide with a broadband output transmission spectrum. Optical transmitted spectrum from the fabricated structure has been reported, and the measured attenuation losses agree with the theoretical predictions.

[1] D. Psaltis,et al. Developing optofluidic technology through the fusion of microfluidics and optics , 2006, Nature.

[2] P. Sarro,et al. Integrated optofluidic Mach–Zehnder interferometer based on liquid core waveguides , 2008 .

[3] R. J. Black,et al. Loss calculations for antiresonant waveguides , 1993 .

[4] Romeo Bernini,et al. Silicon micromachined hollow optical waveguides for sensing applications , 2002 .

[5] A. Hawkins,et al. Waveguide loss optimization in hollow-core ARROW waveguides. , 2005, Optics express.

[6] Mikko Ritala,et al. Atomic layer deposition chemistry: recent developments and future challenges. , 2003, Angewandte Chemie.

[7] P. Russell. Photonic Crystal Fibers , 2003, Science.

[8] Y. Lo,et al. Optofluidic Waveguides in Teflon AF-Coated PDMS Microfluidic Channels , 2009, IEEE Photonics Technology Letters.

[9] Chii-Chang Chen,et al. Semiconductor hollow optical waveguides formed by omni-directional reflectors. , 2004, Optics express.