Micromachined curling optical switch array for PLC-based, integrated programmable add/drop multiplexer
暂无分享,去创建一个
M. Nishimura | T. Sasaki | T. Kanie | K. Koyama | C. Hirose | T. Sano | M. Katayama | H. Okuyama | T. Hattori | S. Semura
[1] J. E. Fouquet,et al. Compact optical cross-connect switch based on total internal reflection in a fluid-containing planar lightwave circuit , 2000, Optical Fiber Communication Conference. Technical Digest Postconference Edition. Trends in Optics and Photonics Vol.37 (IEEE Cat. No. 00CH37079).
[2] J. Fluitman,et al. Electrostatic curved electrode actuators , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.
[3] F. Shimokawa,et al. Multi-element thermo-capillary optical switch and sub-nanoliter oil injection for its fabrication , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).
[4] M. Wu. A low voltage micromachined optical switch by stress-induced bending , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).
[5] Albert K. Henning,et al. Out-of-plane microstructures using stress engineering of thin films , 1995, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
[6] M. Makihara,et al. Strictly non-blocking N/spl times/N thermo-capillarity optical matrix switch using silica-based waveguide , 2000, Optical Fiber Communication Conference. Technical Digest Postconference Edition. Trends in Optics and Photonics Vol.37 (IEEE Cat. No. 00CH37079).
[7] Isao Shimoyama,et al. CMOS drivable electrostatic microactuator with large deflection , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
[8] B. Valk,et al. Vertical mirrors fabricated by reactive ion etching for fiber optical switching applications , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.