초정밀 위치결정기구의 위치 및 자세제어

In this paper, we address the development of control scheme for the magnetic levitation positioning system. This planar magnetic levitator employs four permanent magnet liner motors. Each motor generates vertical force for suspension against gravity, as well as horizontal force for propulsion. This stage can generate six degrees of freedom motion by the vertical and horizontal force. We proposed control algorithm for the magnetic levitation stage from its initial configuration to its desired one using sliding mode control. Simulation result is provided to verify the effectiveness of the proposed control scheme.