论文信息 - Modeling and optimal design of piezoelectric cantilever microactuators

Modeling and optimal design of piezoelectric cantilever microactuators

A novel model is described for predicting the static behavior of a piezoelectric cantilever actuator with an arbitrary configuration of elastic and piezoelectric layers. The model is compared to deflection measurements obtained from 500-/spl mu/m-long ZnO cantilever actuators fabricated by surface micromachining. Modeled and experimental results demonstrate the utility of the model for optimizing device design. A discussion of design considerations and optimization of device performance is presented.

A. Pisano | D. DeVoe

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