Analysis and Compensation of Benchmark Drift of Micromachined Thermal Wind Sensor Caused by Packaging Asymmetry

In this article, the benchmark drift of micromachined thermal wind sensor due to the packaging asymmetry has been analyzed and compensated. For the ideal wind sensors with symmetric packaging, the benchmark does not vary with speed and direction. However, for the real sensors, especially for handmade ones, packaging asymmetry problems are usually inevitable. Consequently, benchmark drifts with wind because of different thermal distribution in each direction, which was verified by the proposed lumped parameters model. The real sensors were tested in a wind tunnel and results showed the benchmark drift as well. The contribution of this work lies in the establishment of the equation of benchmark dependent on wind speed, which can predict benchmark value under different wind speeds by calibration at zero wind speed. This compensation method is extremely simple and convenient for industrial production. After compensation, the relative wind speed errors are reduced from 46 to 8% up to 30 m/s, and the wind direction errors are reduced from 30° to 7° over the full range of 360°.