Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution

In this paper, we present the mechanical sensitivity improvement of a disk resonator gyroscope (DRG) by optimizing the thickness distribution of the nested rings. The mechanical sensitivities of the DRGs with uniform, linearly changing, and step changing rings have been simulated. The results suggest that the ring thickness distribution has great influence on the performance of the DRG. Then, the optimized ring thickness distribution was obtained by using the traditional method of moving asymptotes (MMA), which result in a 24% improvement of the mechanical sensitivity. Finally, the bio-inspired particle swarm optimization (PSO) algorithm has also been used. The optimization results of PSO coincide well with that of MMA, and the optimized result is the global optimum. Meanwhile, the optimized distribution rules can be used on the series of DRGs and the optimization methods can be widely used on other microelectromechanical systems (MEMS) devices.

[1]  Riccardo Poli,et al.  Particle swarm optimization , 1995, Swarm Intelligence.

[2]  M. Esashi,et al.  Energy dissipation in submicrometer thick single-crystal silicon cantilevers , 2002 .

[3]  J. S. Burdess,et al.  A digital signal processing-based control system for a micro-electromechanical systems vibrating gyroscope with parametric amplification and force rebalance control , 2013, J. Syst. Control. Eng..

[4]  Xiang Xi,et al.  A study on Q factor of the trimmed resonator for vibratory cupped gyroscopes , 2014 .

[5]  F. Ayazi,et al.  High-frequency capacitive disk gyroscopes in (100) and (111) silicon , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).

[6]  John Y. Liu,et al.  Boeing Disc Resonator Gyroscope , 2014, 2014 IEEE/ION Position, Location and Navigation Symposium - PLANS 2014.

[7]  Thomas W. Kenny,et al.  Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon , 2015, Journal of Microelectromechanical Systems.

[8]  J. Cho.  High-performance micromachined vibratory rate- and rate-integrating gyroscopes , 2012 .

[9]  R. Candler,et al.  Particle swarm optimization for design of MEMS resonators with low thermoelastic dissipation , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[10]  M. A. Philippine,et al.  Topology Optimization of Stressed Capacitive RF MEMS Switches , 2013, Journal of Microelectromechanical Systems.

[11]  F. Ayazi,et al.  A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability , 2008, Journal of Microelectromechanical Systems.

[12]  K. Najafi,et al.  Fused-Silica Micro Birdbath Resonator Gyroscope ( $\mu$-BRG) , 2014, Journal of Microelectromechanical Systems.

[13]  T. Kenny,et al.  Engineering MEMS Resonators With Low Thermoelastic Damping , 2006, Journal of Microelectromechanical Systems.

[14]  Thomas W. Kenny,et al.  Temperature Dependence of the Elastic Constants of Doped Silicon , 2015, Journal of Microelectromechanical Systems.

[15]  Y. Gianchandani,et al.  High resolution micro ultrasonic machining (HR-μUSM) for post-fabrication trimming of fused silica 3-D microstructures , 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).

[16]  K. Najafi,et al.  A HARPSS polysilicon vibrating ring gyroscope , 2001 .

[17]  Michael C. L. Ward,et al.  Issues associated with the design, fabrication and testing of a crystalline silicon ring gyroscope with electromagnetic actuation and sensing , 1998 .

[18]  Alberto Corigliano,et al.  Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope , 2015, Scientific Reports.

[19]  Robert T. M'Closkey,et al.  A systematic method for tuning the dynamics of electrostatically actuated vibratory gyros , 2006, IEEE Transactions on Control Systems Technology.

[20]  Robert T. M'Closkey,et al.  Modal Parameter Tuning of an Axisymmetric Resonator via Mass Perturbation , 2015, Journal of Microelectromechanical Systems.

[21]  Gabriel M. Rebeiz,et al.  Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design , 2013, Journal of Microelectromechanical Systems.

[22]  K. Townsend,et al.  Precision mode matching of MEMS gyroscope by feedback control , 2011, 2011 IEEE SENSORS Proceedings.

[23]  Jan Schroers,et al.  Metallic Glass Hemispherical Shell Resonators , 2015, Journal of Microelectromechanical Systems.

[24]  D. Horsley,et al.  Hemispherical wineglass resonators fabricated from the microcrystalline diamond , 2013 .

[25]  Russell C. Eberhart,et al.  A new optimizer using particle swarm theory , 1995, MHS'95. Proceedings of the Sixth International Symposium on Micro Machine and Human Science.

[26]  Jonathan James Lake,et al.  Particle Swarm Optimization for Design of Slotted MEMS Resonators With Low Thermoelastic Dissipation , 2014, Journal of Microelectromechanical Systems.

[27]  Jeffrey A. Neasham,et al.  Experimental investigation of parametric and externally forced motion in resonant MEMS sensors , 2008 .

[28]  K. Svanberg.  The method of moving asymptotes—a new method for structural optimization , 1987 .

[29]  Thomas W. Kenny,et al.  Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump , 2014 .

[30]  Andrei M. Shkel,et al.  Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators , 2014, Journal of Microelectromechanical Systems.

[31]  Siavash Pourkamali,et al.  A finite element analysis of thermoelastic damping in vented MEMS beam resonators , 2013 .

[32]  A. Shkel.  Type I and Type II Micromachined Vibratory Gyroscopes , 2006, 2006 IEEE/ION Position, Location, And Navigation Symposium.

[33]  Farrokh Ayazi,et al.  Eutectic trimming of polysilicon micro hemispherical resonating Gyroscope , 2013, 2013 IEEE SENSORS.